News & Public Relations
ISMI to Report Progress at Semicon West
Date: 10 Jul 2009
At next week's SEMICON West show, ISMI will meet the supplier community to discuss progress with the 450 mm and Next Generation Factory programs. The 450 mm effort is moving from automation and wafer handling testing to demonstration wafer processing equipment. Updated metrics for 60 different types of equipment were posted to the ISMI website early today.
By David Lammers, News Editor -- Semiconductor International, July 6, 2009
ISMI last week took ownership of a particle and edge defect inspection tool from Nanophotonics AG (Maintz, Germany), according to Tom Jefferson, 450 mm program manager. Film thickness measurement and particle removal tools are on order and will be installed later this year to the Interoperability Test Bed (ITB) at ISMI. A major step forward, he said, is that single-crystal 450 mm wafers are now being shipped around to various equipment suppliers for R&D programs.