REFLEX TT
Manual 2"-300 mm Wafer Inspection
| Features | Benefits |
|
– Front side defect inspection – Sensitivity down to 0.09 μm LSE – 2”– 300 mm Si wafers – 3”– 8” transparent wafers – 2,5”x 2,5”– 8”x 8” mask blanks – Compound semiconductors |
– Very flexible tool matching various applications – Low cost 300 mm entry – Low cost of ownership – User friendly operation – Small footprint |
Application
Today’s semiconductor and related industries are confronted with a significant challenge to monitor defects on unpatterned wafers and mask blanks. The manually operated table top REFLEX TT is the ideal system for defect inspection in an R&D and lab environment. Its laser dark field measurement technology and the user friendly software provide
a wide range of applications.
A set of different substrate holders offers a unique flexibility of the system to process a wide range of applications such as silicon, compound semiconductors (GaAs, GaN, GaAIN), transparent films on silicon, metal films, amorphous silicon and polysilicon as well as glass and mask blanks with one and the same system.
Design
The defect inspection system REFLEX TT (table top) is a manually operated tool for detecting particles, scratches, area defects and micro-roughness (haze) on the front side of unpatterned wafers. A powerful Automatic Defect Classifi cation (ADC) provides extended defect analysis. Substrates of various shape and diameter from 2’’up to 300 mm and mask blanks up to 8’’x 8’’ can be accommodated. The unit employs advanced diode laser illumination and a patented optical light collection system for measuring the back scattered light down to 90 nm LSE particle sensitivity.
The class 1 mini-environment makes it even more versatile and suitable in environments up to class 10000. The system incorporates an integrated
minicomputer and FPD which also makes an offline analysis possible and provides a good correlation to known industry standards.
It is an ideal and cost effective tool for process characterization and contamination monitoring for R&D purposes. The unit can be connected to a LAN for off-line data analysis.
Options
Vacuum chuck wafer tray
Edge grip wafer tray
Software licence for off-line data analysis
