Substrate Handling
Substrates for Semiconductor & Photovoltaic Industry
- up to 4 magazines
- up to 4" x 4" square shape
- Customized magazines
- Fully integrated sensor technology
- Push principle with conveyor
- additional gripper to load/unload substrates from chuck
- handling of warped substrates (up to 5 mm)
- stand-alone system with configurable standard interface
