AMX 6000 Series
Front Side, Pellicle and Back Side Inspection
Features
- High Throughput
- High Sensitivity
- High Capture Rates
- Very attractive Price/Performance Ratio
- Additional Information such as Uniformity
Advantages & Benefits
- Higher Inspection Frequency and enhanced Productivity
- Yield increase
- Lower Inspection Cost per Mask
- Cost-of-Ownership Advantage
- Quick Return-on-Investment
Design
Under the AMX design the company offers four mask inspection systems specially designed to fit your application:
AMX FSI 6000
Frontside inspection system for front end applications in mask shops
- incoming quality inspection of mask blanks
- continuous tool/process monitoring
AMX PLI 6000
Pellicle inspection system for back end applications in mask shops
- outgoing quality inspection of pellicles
AMX BSI 6000
Backside inspection system for back end applications in mask shops
- outgoing quality inspection of photomasks
AMX PBI 6000
Combined pellicle and backside inspection system for back end applications in mask shops
- outgoing quality inspection of pellicles
- outgoing quality inspection of photomasks
