REFLEX AC
Automatic 4"-8" Wafer Inspection
| Features | Benefits |
|
– Front side defect inspection – Sensitivity down to 0.09 μm LSE – 4” & 6”, 6” & 8”, 4” & 5”, 5”& 6” Si wafers – 8” transparent wafers |
– Flexible tool – Low cost of ownership – User friendly operation – Small footprint |
Application
Process engineers in R&D and production environment
are looking for a flexible, compact and cost efficient stand-alone defect inspection system which can also be used as a bridge tool. The REFLEX AC automatic open cassette defect inspection tool allows the handling of different open cassette types. Typical applications are automatic defect monitoring in a production environment, e.g. after metallization processes in BEOL.
The system covers a wide range of materials from silicon and various metallic and non-metallic films on silicon as well as glass and compound
semiconductors like GaAs, GaN, or GaAIN. Depending on the configuration, the defect inspection is designed to detect and classify particles, scratches, area defects and haze on the wafer front side.
Design
The REFLEX AC is a fully automated stand alone defect inspection tool for detection and classifi cation of particles, scratches, area defects and micro-roughness (haze) on unpatterned wafers.
Different wafer substrates, materials and sizes from 4” up to 8” diameter can be measured. The REFLEX AC automatic open cassette defect inspection can be operated as a bridge tool for two wafer sizes to be specified by the customer: 4” and 6” or 6” and 8” or 4” and 5” or 5” and 6”. The heart of this compact dark fi eld metrology tool is a high lifetime diode laser and a patented optical collection system with resolution down to 90 nm LSE.
The Automatic Defect Classification (ADC) software also provides offl ine data visualization and analysis for the operator and provides a good correlation to known industry standards. The automated handling of different open cassette types and integrated notch and fl at alignment allows wide flexibility for using REFLEX AC in various environments like contamination monitoring, R&D, production and quality inspection.
Options
Vacuum chuck wafer tray
Edge grip wafer tray
Data transfer to/from Fab host via SECS/GEM
Software licence for off-line data analysis
