REFLEX MC (MetriCubes®)
Easy retrofit of existing tool set
Enables integration to process tools and sorters
Retrofit of sorters
Enables integrated metrology
REFLEX MC (MetriCubes®) Series
The flexibility of the REFLEX MC system enables to combine various numbers of inspection units (MetriCubes®) and measurement applications that fi t customer’s needs.
REFLEX AF FSI – Front Side Inspection
- Front side defect inspection of 200/300/450 mm Si wafers and 200 mm glass wafers
REFLEX AF BSI – Back Side Inspection
- Back side defect inspection of 300/450 mm Si wafers
- Laser dark fi eld back side inspection
- No wafer fl ipping
REFLEX AF EI – Edge Inspection
- Edge inspection of 300/450 mm Si wafers
- CCD edge inspection with 360° image of total wafer edge
- Notch inspection
Applications/Materials
300/450 mm Si wafers
