Transparent Conductive Oxides Processes (TCO‘s)
Served for:
- Optoelectronic devices
- Displays
- LED‘s
- Photovoltaic solar cells
PROVAC serves the worldwide market specializing in TCO processes. Customized applications, using ITO, CTO, GeTO and AZO are our speciality.
- Indium Tin Oxide on BK7 Glass
- Basic system TAURION 800 Vacuum pump system WOD 222B
- VELCO 500 CRYO with 90° elbow
- 3 segment calotte with calotte heating
- Source EV-M8
- Plasma source
- 4 pocket crucible
- QSP620 film thickness measurement
- MFC for oxygen
- PROVAC PC process controller
Low Temperature Process (< 100° C) Resistivity < 4 x E- 4 ohm x cm
