PAS Sputtering System
Application & Market
- Optimized footprint requires minimum floor space
- Double load lock system offers highest throughput
- Fully automatic handling from cassette to cassette
- Manual version available
- State-of-the-art PC control offers highes reproducibility
- Maintenance friendly system configuration
- Excellent service system configuration
- EU conformity
Application & Market
Provac serves the worldwide market specializing in thin pure silicone layers made by precise sputtering processes. Customized appliations for SAW devices and solar cells.
