RWS 200 Radial Wafer Sorter

Ricmar now offers the next generation of wafer handling systems capable of wafer sorting, wafer tracking, and inspection. The RWS 200 wafer sorter is a multi-function system that solves virtually all of your wafer handling and sorting needs. Incorporating the latest technology in robotics, wafer alignment, and OCR/BCR vision systems, Ricmar wafer sorters eliminate operators from manually handing wafers providing increased line yields thus reducing the per wafer cost to the manufacturer.

The RWS 200 standard applications include:

• Wafer Sorting
• Wafer Transfers
• Lot Splits
• Merging
• ID Mapping

The RWS 200 wafer sorters are designed around the ROB 310 series robot. This single SCARA type robot accesses the cassette and stage positions that are laid out in an optimized radial format. The robot uses two opposing end-effectors to maximize through-put. A class 1 laser scanning system, positioned on the robots upper link arm, provides a fast and accurate map of the wafers in the cassettes. The SPA pre-aligner allows precise alignment of the wafer including flat/notch positioning. The pre-aligner is also used to position the laser scribes allowing the wafer to be read using an OCR/BCR vision system (optional). The Sorter Manager Software has been developed to aggressively control and track all wafer handing. It allows for sorter operation in manual, automatic, and host modes. The automatic and host modes processing is carried out as recipes, that are fully programmable by the user. To ensure safe handling of the wafers during any facility failures, an uninterruptible power supply and vacuum back up are used to prevent wafer damage and data loss.

The RWS 200 wafer sorter is capable of direct wafer transfers. The throughput with scribe reading is exceeding 300 wafers per hour. The tool uses a PC with a Windows operating system to ensure speed and reliability. The tool is fully SECS/GEM/HSMS compliant. The Sorter Manager Software is easy to use and allows the user to set up the tool according to his needs. Recipes run at the touch of 10 programmable hot buttons, making operation a one touch solution.

• Ergonomic Tilt Cassettes
• SECS/GEM/HSMS Software
• OCR/BCR Vision System
• Custom Configuration