NanoPhotonics

Since foundation in 1997, NanoPhotonics stands for compact modular wafer defect inspection for various applications in the semiconductor industry. As member of the Ricmar Group we are able to react on a large variety on customer demands for automatic defect inspection in combination wafer handling and logistics.

Our customers relay on flexible defect inspection tools for wafer front side, back side and edge inspection. The state-of-the-art tools are applied in process development, tool qualification, R&D, and for yield improvement in high volume manufacturing. We set international standards with our innovative modular product architecture and strong engineering capabilities that allow us to react quickly to customer’s needs and to provide cost effective solutions. Our strong software team provides powerful automatic defect classification solutions enabling fully automatic quality inspection at various steps in semiconductor manufacturing processes.

The basis of our success is both the consistent approach to the requirements of the market, and our strong customer orientation.
Our skilled staff is known for excellent and flexible customer support like comprehensive training, fast and reliable service, competent application support and our calibration wafer service.
Our experienced R&D teams in fields of software, automatic defect classification, optical design, mechanics and electronics ensure consistent approach to the market requirements.
The application team provides excellent customer support carrying out measurements on the customer’s wafers. Additionally we provide in-depth analysis of your metrology problem in our own class 100/10/1 demo clean room. Our very compact tools allow us to provide on-site demos in your facility.