Performance
- Cleanroom capability: up to US-Fed. class 1000
- DPSS UV-Laser in standard setup
- Customer specific I/O handling system and for automatic loading and unloading of wafers
Options
- sorting, merging, splitting and wafer-ID validation functions
- Linear Axis
- Rotary Axis
- Exhaust systems
- Customer specific I/O systems
- Customization of system
- Further options on request
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