AMX 6000 Series

Features

• High Throughput
• High Sensitivity
• High Capture Rates
• Very attractive Price/Performance Ratio
• Additional Information such as Uniformity

Advantages & Benefits

• Higher Inspection Frequency and enhanced Productivity
• Yield increase
• Lower Inspection Cost per Mask
• Cost-of-Ownership Advantage
• Quick Return-on-Investment

Under the AMX design the company offers four mask inspection systems specially designed to fit your application:

AMX FSI 6000

Frontside inspection system for front end applications in mask shops

• incoming quality inspection of mask blanks
• continuous tool/process monitoring

AMX PLI 6000

Pellicle inspection system for back end applications in mask shops

• outgoing quality inspection of pellicles

AMX BSI 6000

Backside inspection system for back end applications in mask shops

• outgoing quality inspection of photomasks

AMX PBI 6000

Combined pellicle and backside inspection system for back end applications in mask shops

• outgoing quality inspection of pellicles
• outgoing quality inspection of photomasks