The WTT 300 wafer transfer tool is designed to transfer wafers from one carrier to another, typically from a FOUP to FOSB or vice versa, or from a FOUP to open cassettes, etc. The primary difference between a WTT and wafer sorter is the WTT only transfers the wafers and does not align or read ID’s. Therefore, some might considered the WTT to be a wafer sorting system. As an option, a pre-aligner and OCR reader can be integrated.
This would enable the WTT to perform as a wafer sorting system. Additionally, Ricmar highly configurable design easily accommodates multiple types of metrology modules. Currently integrated are thin fi lm measurement (based on spectral reflectance technology), backside, and edge inspection modules. Application notes are available for each of these options upon your request.
The WTT 300 is a very versatile fully automatic wafer sorting system, meeting all wafer transfer and most wafer sorting requirements. This very flexible system is
configurable up to three custom loadports. The basic automation module is designed for minimal footprint with maximum flexibility. An integrated robot with a cassette mapper serves as the core of the system, picking and placing substrates to and from the various inputs and outputs. Three sides are equipped with BOLTS interfaces, allowing for the integration of commercially available, as well as, custom loadport types.
The WTT employs Ricmar’s machine control and sorting software providing an operator friendly-easy to use touch screen, a light tower, vacuum pump,
and EMO circuit.
Optionally, the WTT can be equipped with bar code scanner, ionizer, and fan fi lter unit for an improved cleanroom classifi cation.
Various types of handling methods are available with this tool. In addition to the standard backside vacuum, options include edge grip or contact less wafer handling. The growing MEMS market requires modern handling systems to be able to adapt to the broad range of substrates and there unique requirements.
The Ricmar WTT 300 can accommodate most MEMS substrates with its smart and flexible design. The system provides the highest possible throughput. This is highly dependant on the method used to hold the substrates. Ricmar’s application team will available to analyze your requirements and substrates to find the most cost effi cient and fastest method of solving your handling needs.